S neox Cleanroom sensor: 马来西亚的首选 Radiant Advanced Devices Sdn Bhd

详情

Highest flexibility compatible with Cleanroom

The S neox Cleanroom is an unprecedented technological milestone for Optical Metrology. It provides the highest versatility within production environments.

With its 4-in-1 technology and 4 different light sources, it provides unparalleled adaptability for changing application requirements.

It has been carefully engineered to be compatible with ISO Class 1 and ESD compatible.

The S neox Cleanroom has the option to incorporate a piezoelectric Z motor which allows for greater performance. It also covers thickness measurements from 50 nm to 5 mm.

Our equipment has the functionality to find the best acquisition setting for your measurement: simply focus on your sample’s surface, and the integrable head will do the rest.

Sensofar Event 22

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Dimensions

mm (inches)
Weight: 8.3 Kg (18.4 lbs)

Technologies

Confocal Interferometry Ai Focus Variation
PSI ePSI CSI

Light sources

630 nm 530 nm 460 nm 575 nm

Objective lenses

Brightfield

MAG	5X	10X	20X	50X	100X	150X
NA	0.15	0.30	0.45	0.80	0.90	0.90
WD (mm)	23.5	17.5	4.5	1.0	1.0	1.5
FOV¹ (µm)	3378 x 2826	1689 x 1413	845 x 707	338 x 283	169 x 141	113 x 94
Spatial sampling² (µm)	1.38	0.69	0.34	0.13	0.07	0.05
Optical resolution³ (µm)	0.94	0.47	0.31	0.18	0.16	0.16
System noise⁴ (nm)	100	30	8	4	3	2
Maximum slope⁵ (º)	9	17	27	53	64	64

Interferometry

MAG	2.5X	5X	10X	20X	50X	100X
NA	0.075	0.13	0.30	0.40	0.55	0.70
WD (mm)	10.3	9.3	7.4	4.7	3.4	2.0
FOV¹ (µm)	6756 x 5652	3378 x 2826	1689 x 1413	845 x 707	338 x 283	169 x 141
Spatial sampling² (µm)	2.76	1.38	0.69	0.34	0.13	0.07
Optical resolution³ (µm)	1.87	1.08	0.47	0.35	0.26	0.20
System noise⁴ (nm)	PSI / ePSI 0.1 nm (0.01 nm with PZT) CSI 1 nm
Maximum slope⁵ (º)	4	7	17	24	33	44

1 Maximum field of view with 3/2” camera and 0.5X optics. 2 Pixel size on the surface. 3 L&S: Line and Space. Values for blue LED. 4 System noise measured as the difference between two consecutive measures on a calibration mirror placed perpendicular to the optical axis. For PSI, 10 phase averages with vibration isolation activated. The 0.01 nm are achieved with Piezo stage scanner and temperature controlled room. Values for green LED (white LED for CSI). Resolution HD. 5 On smooth surfaces, up to 71º. On scattering surfaces, up to 86º.

Z performance

Z	COARSE (Linear stage)	FINE (Piezoelectric scanner with capacitive sensor)
Vertical range	40 mm	200 µm
Resolution	5 nm	1.25 nm

Accuracy and repeatability

Standard	Value	U, σ	Technique
Step height	48600 nm	U=300 nm, σ= 10 nm	Confocal & CSI
	7616 nm	U=79 nm, σ= 5 nm	Confocal & CSI
	941.6 nm	U=7 nm, σ= 1 nm	Confocal & CSI
	186 nm	U=4 nm, σ= 0.4 nm	Confocal & CSI
	44.3 nm	U=0.5 nm, σ= 0.1 nm	PSI
	10.8 nm	U=0.5 nm, σ= 0.05 nm	PSI
Areal roughness (Sa)⁷	0.79 µm	U=0.04 µm, σ=0.0005 µm	Confocal, AiFV & CSI
Profile roughness (Ra)⁸	2.40 µm	U=0.03 µm, σ= 0.002 µm	Confocal, AiFV & CSI
	0.88 µm	U=0.015 µm, σ= 0.0005 µm	Confocal, AiFV & CSI
	0.23 µm	U=0.005 µm, σ= 0.0002 µm	Confocal, AiFV & CSI

Objective lense used for Confocal and Ai Focus Variation 50X 0.80 NA and for CSI and PSI 50X 0.55NA.
Resolution 1220×1024 pixels. All measurements are done using PZT.
Uncertainty (U) according to ISO/IEC guide 98-3:2008 GUM:1995, K=1,96 (level of confidence 95%).
σ according to 25 measures.
7 Area of 1x1mm. 8 Profile of 4mm length.

Certification

It has been carefully engineered to be compatible with ISO Class 1 and ESD compatible.