Wafer Robot Dual Arm (SEMWR-185Z340D)

Wafer Robot Dual Arm (SEMWR-185Z340D)

Category: DUAL ARM Available
For more information, visit our official website at sem-eq.com

Description



Highly maneuverable servo motors and control software for low vibration, smooth, and rapid handling.
It is mainly used in the semiconductor industry, such as the handling and turning of precision products such as silicon wafers, etc., and also used for the precision transportation and transfer of other processing elements. 





Model :

 



Dimensions :



 

Specifications :
 
Type Dual arms
Applicable specifications -300mm
Rated load 0.5KG
Degree of freedom 4
Fixing method B0X5 (bottom fixed)/T0X5 (top fixed)
Range of motion - lifting axis Z 340mm
Range of motion - revolving axis T 340deg
Range of motion - stretching axis R 360mm
Range of motion - stretching axis W 360mm
Maximum speed - lifting axis Z 400mm/s
Maximum speed - revolving axis T 260deg/sec
Maximum speed - stretching axis R 1500mm/s
Maximum speed-telescopic axis W 1500mm/s
Repeated accuracy +0.1mm
Machine weight (excluding controller) 60kg
Cleanliness Class100
Voltage requirements Single phase220V50/60Hz
Vacuum requirements Φ6x1,-50~-70kpa
I/O interface 4-way configurable digital input and output, 8-way universal digital input and output
(extended with 8-way input and output)
Ethernet 1pc
USB 2pcs
RS232/RS485 1pc
Communication protocol Modbus-RTU/TCP、Socket

 

More detail about SEM Equipment Sdn. Bhd.
SEM Equipment Sdn. Bhd.
SEM Equipment Sdn. Bhd. Industrial Equipment Manufacturer, Ultrasonic Equipment Supplier, Laser Equipment Supply in Johor Bahru (JB), Malaysia ~ SEM Equipment Sdn. Bhd.
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