1) System Chamber:
– Transfer Chamber (1 pc)
– LoadLock Chamber (1 pc)
– Evaporation Chamber (3 pcs)
– Mask LaodLock Chamber (1 pc)
– UnLoadLoack Chamber (1 pc)
2) JOEL Power Supplies:
JST-F Series EB Source Power Supply (Please refer to pic sent)
– JEOL JEBG-163MB (Electron Beam Evaporator Source) – 2 pcs
– JOEL EBG-203 Series (Electron Beam Evaporator Source) – 1 pc
3) Evaporator Controller:
– IC-5 Inficon thickness controller (3 pcs)
4) Control Panel (Pls refer to the pic)
5) Pump system
– Ulvac Cryo pump – 5 pcs
– Pfieffer Turbo pump – 2 pcs
– Roots Pump (3 pcs)
– Dry Back pump (5 pcs)
6) Gate Valve – V-Tex
7) Gauges
Anelva Bayard-Alpert Gauge
Ulvac Pirani Gauge
8) All cables in the system.
Download System Manual here
1) System Chamber:
– Transfer Chamber (1 pc)
– LoadLock Chamber (1 pc)
– Evaporation Chamber (3 pcs)
– Mask LaodLock Chamber (1 pc)
– UnLoadLoack Chamber (1 pc)
2) JOEL Power Supplies:
JST-F Series EB Source Power Supply (Please refer to pic sent)
– JEOL JEBG-163MB (Electron Beam Evaporator Source) – 2 pcs
– JOEL EBG-203 Series (Electron Beam Evaporator Source) – 1 pc
3) Evaporator Controller:
– IC-5 Inficon thickness controller (3 pcs)
4) Control Panel (Pls refer to the pic)
5) Pump system
– Ulvac Cryo pump – 5 pcs
– Pfieffer Turbo pump – 2 pcs
– Roots Pump (3 pcs)
– Dry Back pump (5 pcs)
6) Gate Valve – V-Tex
7) Gauges
Anelva Bayard-Alpert Gauge
Ulvac Pirani Gauge
8) All cables in the system.
Packing List for Tokki Evaporator System
